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真空沉积法制备InSb纳米颗粒
引用本文:孙全,何焰兰,吕志辉,黄水花.真空沉积法制备InSb纳米颗粒[J].应用光学,2005,26(1):46-48.
作者姓名:孙全  何焰兰  吕志辉  黄水花
作者单位:国防科学技术大学,理学院,湖南,长沙,410073
摘    要:采用真空沉积的方法在SiO2基片上制备出了纳米InSb颗粒薄膜.利用原子力显微镜对4片样品表面进行分析,从其表面形貌图和三维图中可以观察到有粒径均匀的纳米InSb颗粒形成并且均匀地分布在SiO2基片表面.实验表明,通过改变镀膜时间可以得到具有不同颗粒尺寸的InSb纳米颗粒,并且颗粒直径与沉积时间和厚度成正比.

关 键 词:纳米InSb颗粒  真空蒸发沉积  原子力显微镜
文章编号:1002-2082(2005)01-0046-03
收稿时间:2003/8/16

InSb Nano-pellet Films Prepared with Vacuum Evaporation Deposition
SUN Quan,HE Yan-lan,LV Zhi-hui,HUANG Shui-hua.InSb Nano-pellet Films Prepared with Vacuum Evaporation Deposition[J].Journal of Applied Optics,2005,26(1):46-48.
Authors:SUN Quan  HE Yan-lan  LV Zhi-hui  HUANG Shui-hua
Institution:College of Science, National University of Defense Technology, Changsha 410073, China
Abstract:We get nanometer-sized InSb particle films deposited on the SiO_2 subs trate by using vacuum evaporation. The atomic force microscopy was applied to the morphology survey of the film surfaces. The results show that the films are composite of nano-particles of InSb.With the analysis of the scanning images of these samples, the result of the experiment proves that different sizes of InSb particles can be formed by changing the plating time.
Keywords:InSb nano-pellet  vacuum evaporation deposition  atomic force microscope
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