| 大口径平面镜快速瑞奇-康芒测量法研究北大核心CSCD |
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| 引用本文： | 刘昕,王聪,刘永强,袁阳,陈晓磊,张瑜,韩娟妮,张超凡.大口径平面镜快速瑞奇-康芒测量法研究北大核心CSCD[J].应用光学,2022,43(4):707-713. |
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| 作者姓名： | 刘昕 王聪 刘永强 袁阳 陈晓磊 张瑜 韩娟妮 张超凡 |
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| 作者单位： | 西安应用光学研究所 ，陕西 西安 710065 |
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| 基金项目： | 国防基础科研项目（JCKY2020208B021） |
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| 摘 要： | 瑞奇-康芒法是用小口径干涉仪检测大口径平面镜的主要方法之一。通过分析瑞奇-康芒法中球面参考镜半径、平面镜位置和瑞奇角误差对测量精度的影响,给出了3个参数的选择方法。针对瑞奇-康芒法测量时误差分离导致的测量效率低的问题,提出适用于加工过程的快速瑞奇-康芒测量法,仿真模拟该方法下被测平面镜位置、角度等定位误差对测量结果的影响,并设计实验对比验证。该方法与直测法测量间的最大偏差峰-谷值(PV)为0.0151μm,均方根(RMS)为0.0036μm,能够有效满足加工过程中面形快速测量需求。
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| 关 键 词： | 光学测量 大口径平面镜 快速检测 瑞奇-康芒 |
| 收稿时间： | 2022-05-16 |
Rapid Ritchey-Common measurement method of large-aperture flat mirror |
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| Institution: | Xi'an Institute of Applied Optics, Xi'an 710065, China |
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| Abstract: | The Ritchey-Common method is one of the main methods to measure the large-aperture flat mirror with small-aperture interferometer. By analyzing the influence of radius of spherical reference mirror, position of flat mirror and error of Ritchey angle on the measurement accuracy in this method, the selection method of the three-parameter was given. Aiming at the inefficient measurement caused by error separation in Ritchey-Common method, a rapid Ritchey-Common measurement method during processing was proposed. The influence of positioning errors such as position and angle of the measured flat mirror on the measurement results was simulated, and the experiments were carried out. The maximum deviation peak-valley value (PV) between this method and the direct measurement method is 0.015 1 μm, and the root-mean-square (RMS) is 0.003 6 μm, which can effectively meet the needs of rapid surface measurement in processing. |
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