激光高反射膜的研究 |
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引用本文: | 蒋向东,张怀武,黄祥成.激光高反射膜的研究[J].应用光学,2003,24(1):25-27. |
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作者姓名: | 蒋向东 张怀武 黄祥成 |
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作者单位: | 1. 电子科技大学,信息材料工程学院,四川,成都,610064 2. 西安应用光学研究所,陕西,西安,710065 |
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摘 要: | 研究混合膜(TiO2 Ta2O3;Ta2O5 ZrO2)的色散规律,用Ta2O5 ZrO2和SiO2成功地镀制出两个波段(632.8nm,1.06μm)的激光反射膜,使激光破坏阈值提高5%-15%(1.06μm),膜层吸收小,机械强度增加。
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关 键 词: | 激光反射膜 薄膜材料 混合膜 色散规律 |
文章编号: | 1002-2082(2003)01-0025-03 |
收稿时间: | 2002/4/25 |
STUDY OF HIGH REFLECTION LASER THIN FILM |
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Abstract: | The dispersive laws of TiO2+Ta2O3and Ta2O5+ZrO2 mixed thin films is studied separately. The laser reflection thin films with Ta2O5+ZrO2and SiO2is successfully coated at 632.8nm and 1.06μm . As a result the threshold of laser damage has been increased by a factor of about 5%~15%, and low film absorption and high mechanical strength have been obtained. |
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Keywords: | Laser reflecting film material of thin film |
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