光学薄膜的误差、允差分析及生产过程中的计算机控制

指出实际生产出的薄膜的光学特性和理论计算得到的光学特性常常存在差别的原因．诸如理论模型假设时忽略一些因素引起的差别．薄膜久置引起的薄膜结构改变或吸潮、污染等．以及制造过程中造成的误差(光学监控系统引起的薄膜厚度和折射率的误差)。针对各种误差的来源提出了相应的改善方法。通过对光学监控系统引起的薄膜厚度和折射率的误差进行分析．提出膜系的允差分析．尽量减小由于监控设备引起的误差。最后介绍了实际生产过程中计算机的优化思路。

Analysis of Error Sensitivity and Allowable Error of Optical Film, and Computer Controll in Production

There is a distinction between the film optical characteristic calculated in theory and the optical characteristic appearing in actual measurement. It can be caused by many reasons, such as the incomplete theoretical model, the structural change when the film is stored away for a long time and the fabrication error. The corresponding methods in allusion to the cause to eliminate or avert the error is proposed. The film thickness and refractive index is the key to film preparation.In this paper, we analyzed the error of film thickness and refractive index caused by the optical control system, and also analysed the allowable error. In the end, we put forward the thought of computer real time optimization.