| 用ZEMAX模拟五棱镜误差对平行度检测的影响 |
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| 引用本文： | 闫亚东,何俊华,仓玉萍,陈良益.用ZEMAX模拟五棱镜误差对平行度检测的影响[J].应用光学,2007,28(5):649-653. |
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| 作者姓名： | 闫亚东 何俊华 仓玉萍 陈良益 |
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| 作者单位： | 1. 中国科学院西安光学精密机械研究所,陕西,西安,710119;中国科学院研究生院,北京,100039
2. 中国科学院西安光学精密机械研究所,陕西,西安,710119 |
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| 摘 要： | 介绍了用五棱镜法检测大口径光束平行度的原理。分析了五棱镜加工的角度误差及面形误差对检测结果的影响，得出了五棱镜角度误差不影响检测结果，2个折射面的面形误差对检测结果的影响较小，2个反射面的面形误差对检测结果影响最大的结论。介绍了选择五棱镜的方法和减小面形误差影响的方法。最后，给出了用五棱镜法检测单星模拟器出射光束平行度的应用实例。
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| 关 键 词： | 五棱镜法 平行度检测 ZEMAX模拟 角度误差 面形误差 |
| 文章编号： | 1002-2082（2007）05-0649-05 |
| 收稿时间： | 2006/12/15 |
| 修稿时间： | 2006-12-152007-03-02 |
Effect of penta-prism error on parallelism detection |
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| YAN Ya-dong,HE Jun-hua,CANG Yu-ping,CHEN Liang-yi.Effect of penta-prism error on parallelism detection[J].Journal of Applied Optics,2007,28(5):649-653. |
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| Authors: | YAN Ya-dong HE Jun-hua CANG Yu-ping CHEN Liang-yi |
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| Institution: | 1. Xi′an Institute of Optics and Precision Mechanics of CAS, Xi′an 710119,China; 2. Graduate School of CAS, Beijing 100039, China |
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| Abstract: | The detection concept for large diameter beam parallelism with penta prism is introduced. The effect of penta prism angle and surface profile errors on parallelism detection was analyzed. It is concluded that the angle error has no impact on the detection results and the profile errors of the two refraction surfaces have little effect, but the profile errors of the two reflection surfaces have great influence on the detection. The methods for selecting penta prism and reducing the effect of surface profile error on detection are introduced. At the end, an example is given to illustrate the detection of the parallelism error of a single star simulator with penta prism. |
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| Keywords: | penta prism method parallelism detection ZEMAX simulation angle error surface profile error |
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