全视角高精度三维测量仪光学系统误差分析研究

大视角、高分辨率、低畸变光学成像系统是全视角高精度三维测量仪中最为关键的核心器件。现有三维测量仪实际使用过程中不可避免会产生各种误差，因此科学合理地评估和降低全视角高精度三维测量仪的测量误差具有十分重要的科学及工程应用意义。通过多角度、全方面分析定量研究了相机内方位元素标定误差对几何定位误差的影响，以及相机光学系统MTF分析、点扩散函数分析、波像差分析和公差分析对匹配误差产生的影响。研究结果表明，在各种影响三维测量仪光学成像系统测量误差的因素当中，相机的传递函数是影响系统三维定位误差最主要的因素，当系统MTF_N值大于0.4 lp/mm、系统几何畸变小于1个像素，PSF能量集中在以3 μm为半径的圆环内(小于1个像素)，且PSF峰值达到了0.9时，三维测量仪的定位误差可达到秒级精度。

Error analysis of optical system for full-view and high-precision three-dimensional measuring instrument

The optical imaging system with large viewing angle, high resolution and low distortion is the most critical core device for the full-view and high-precision three-dimensional measuring instrument. The current 3D measuring instruments inevitably produce various errors in the actual use process. Therefore, it is of great scientific and engineering significance to evaluate and reduce the measurement errors producing by the full-view and high-precision 3D measuring instrument scientifically and reasonably.The influence of the camera calibration error of inner orientation elements on the geometric positioning error, and the effects of the modulation transfer function (MTF) analysis for the camera optical system, the point spread function(PSF) analysis, the wave aberration and tolerance analysis on the matching error were studied. The research results show that the camera MTF is the most important factor affecting the three-dimensional positioning error of the system among various factors affecting the measurement error of the optical imaging system for three-dimensional measuring instrument.When the MTF_N value of system is greater than 0.4 lp/mm and the geometric distortion of the system is less than 1 pixel, the PSF energy is concentrated in the ring with a radius of 3 μm(less than 1 pixel) and the PSF peak reaches 0.9, the positioning error of the 3D instrument can reach the second-order accuracy.