光学元件高反射比、高透射比测试技术研究

 为了实现光学元件、光学薄膜等高反射比、高透射比的测量，以单次反射测量法为基础，并结合激光稳功率技术、双光路测量技术以及精密探测技术，建立了一套精密测试系统，实现对光学元件632.8 nm和1 064 nm两个波长下高反射比与高透射比的测量。实验和测量不确定度分析验证测试系统在632.8 nm波长下高反射比与高透射比的测量不确定度优于0.008%，在1 064 nm波长下高反射比与高透射比的测量不确定度优于0.015%。

High reflectance and high transmittance measurement for optical elements

In order to measure high reflectance and high transmittance of optic components and coat films,a precise measurement facility was set up which was based on single reflection measurement using laser power-stabilized technique,double optical path measurement technique and precise detection technique.High reflectance and high transmittance were measured at 632.8 nm and 1 064 nm wavelengths on the facility.Experiment result and uncertainty analysis showed that the measurement uncertainty of high reflectance and...