| 光学薄膜折射率和厚度测试仪检定规程解读 |
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| 引用本文： | 杨照金,王雷,黎高平,许荣国.光学薄膜折射率和厚度测试仪检定规程解读[J].应用光学,2007,28(4):517-519. |
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| 作者姓名： | 杨照金 王雷 黎高平 许荣国 |
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| 作者单位： | 西安应用光学研究所,西安,710065 |
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| 摘 要： | 简要介绍光学薄膜折射率和厚度测试仪检定规程的构成，被检测量仪器的技术指标、主要检定参数和检定方法等。该规程适用于光谱椭偏法测量光学薄膜折射率和厚度的仪器，在从事光学薄膜研究、生产和使用的单位具有广泛的应用前景。
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| 关 键 词： | 检定规程 光学薄膜 厚度测量 折射率测量 |
| 文章编号： | 1002-2082（2007）04-0517-03 |
| 收稿时间： | 2007/6/20 |
| 修稿时间： | 2007-06-202007-06-22 |
Explanation of verification procedure for tester of optical film refractive index and thickness |
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| YANG Zhao-jin,WANG Lei,LI Gao-ping,XU Rong-guo.Explanation of verification procedure for tester of optical film refractive index and thickness[J].Journal of Applied Optics,2007,28(4):517-519. |
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| Authors: | YANG Zhao-jin WANG Lei LI Gao-ping XU Rong-guo |
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| Institution: | Xi′an Institute of Applied Optics, Xi′an 710065，China |
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| Abstract: | The content of the verification procedure for testers of optical film refractive index and thickness is described. The specifications of the instrument under test, the main verification parameters and the verification method are introduced. The procedure applies to the instruments measuring the optical film refractive index and thickness by means of spectrum ellipsometry method. It has a great potential in development, production and application of optical film. |
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| Keywords: | verification regularation optical film measurement of thickness measurement ofrefractive index |
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