一种提高HWS采样率的透镜式微扫描方法

为改善传统哈特曼-夏克波前传感器对待测波前采样不足的缺点，对哈特曼-夏克波前传感器和微扫描进行了分析，提出一种提高哈特曼-夏克波前传感器采样率的透镜式微扫描方法。通过在微透镜阵列之前加入由PZT驱动的透镜扫描装置，对CCD采集的光斑分布情况进行高分辨率微扫描图像重建，通过对重建后的光斑分布进行波前重构，提高了哈特曼波前传感器对待测波前的采样率。通过对比实验验证，波前复原精度提高了41%，可以有效提高哈特曼传感器对波前探测的精度。

Method for increasing HWS sampling rate on lens micro-scanning

In order to improve the shortcoming of insufficient sampling of measured wavefront in traditional Hartmann-Shack wavefront sensor(HWS), the Hartmann Shack wavefront sensor and micro-scanning technology were analyzed, at the same time, the method of lens micro-scanning by raising the sampling rate in Hartmann-Shack wavefront sensor was proposed . The lens scanning device driven by PbZrTiO3 (PZT) was added before the microlens array,and the high resolution micro-scanning image was reconstructed for the spot distribution collected by the charge coupled device (CCD) . After the wavefront reconstruction of the rebuilt spot distribution, the sampling rate of measured wavefront was improved in Hartmann-Shack wavefront sensor. Comparison experiments verify that the method can raise the recovered accuracy of wavefront by 41%, and it can effectively increase the accuracy of wavefront detection in Hartmann-Shack wavefront sensor.