高精度角度加工技术研究

激光陀螺不仅对合光棱镜角度精度有极高的要求，而且对角度和尺寸的一致性有严格的限制。为了加工这种高精度角度光学元件，提出通过手修工装母体复制出成盘加工工装，再复制出光学零件的加工方法，并分析了测角仪的测量精度、面形之间的匹配误差和平行的测量误差所引入的角度加工误差情况，提高了面形加工的平面度，避免了局部不规则现象，控制了温差对面形变化的影响。另外通过降低平行测量的误差以及减小闭合角度之间的叠加误差等具体措施也可以提高光学元件加工效率和角度加工精度。

High precision angle processing

The prism for coupling beam in ring laser gyro has a strict requirement on angle accuracy and its consistency. In order to process optical elements with high-precision angles, a new process is introduced, in which the optical element was processed by the matrix angles copied from the angles of manual repairing matrix. The impact of the goniometer accuracy, the matching error of the surface profiles and parallelism measurement error on angular machining error was analyzed. It is concluded that this process can improve the process efficiency and the machining accuracy by improving the flatness of the optical surface, avoiding local irregularity, controlling the impact of temperature difference effect and reducing the errors of parallelism measurement.