高Q光学微球腔角速度传感效应验证

 根据角速度传感的基本原理，搭建了以高Q光学微球腔为核心敏感部件的角速度传感实验测试系统。实验中通过调制、解调技术得到了光学微球腔的谐振曲线及其相对应的解调曲线，并采用PID反馈控制电路实现了微球腔谐振点的实时跟踪锁定，谐振点锁定精度约为10 kHz。通过对系统提供低、高2组不同的旋转角速度进行实验测试，并对数据进行处理分析，得到系统输出信号幅度的变化趋势与测试转台提供的旋转角速度变化情况相对应的结果。初步验证了高Q光学微球腔的角速度传感效应，为后续深入研究高Q光学微谐振腔角速度传感器件奠定了基础。

Validation of high-Q optical microsphere resonator angular velocity sensor

An angular velocity sensing experimental measurement system, with high-Q optical microsphere cavity as the core sensitive component, was set up based on the theory of angular velocity sensor. During the experiment, the resonance curve of optical microsphere cavity and the corresponding demodulation curve were obtained by the modulation and demodulation; the lock-tracking of resonance point by the proportional-integral-derivative (PID) feedback control circuit was achieved, and the locked accuracy of resonance point was about 10 kHz. The experiment for testing two different rotating angular velocities, low and high, was carried out, then the data was analyzed to obtain the result of the trend of the output signal amplitude corresponding to the change of the rotational angular velocity provided by the test table. The sensing effect of high-Q optical microsphere cavity angular velocity was proved preliminarily, which could provide the foundation for the further research of high-Q optical micro-resonator angular rate sensors.