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子孔径拼接技术应用的研究
引用本文:刘智颖,张磊,胡原,高天元,王志坚.子孔径拼接技术应用的研究[J].应用光学,2008,29(6):1009-1012.
作者姓名:刘智颖  张磊  胡原  高天元  王志坚
作者单位:长春理工大学,光电工程学院,吉林,长春,130022
基金项目:国家863计划,国防863项目
摘    要:大口径光学元件的检测开拓了子孔径拼接应用的新领域。采用小口径干涉仪对大口径被测元件不同区域进行波前检测,然后恢复计算出被测波前。使用光学设计软件ZEMAX对子孔径检测拼接技术进行了模拟,模拟结果表明:波前检测相对误差小于4.3λ‰,实现了对大口径光学元件面形的高精度检测,避免了相同口径检测干涉仪的使用,降低了检测成本及难度。

关 键 词:大口径光学元件  波前检测  子孔径拼接  小口径干涉仪
收稿时间:2007/12/13

Application of sub-aperture stitching technique
LIU Zhi-ying,ZHANG Lei,HU Yuan,GAO Tian-yuan,WANG Zhi-jian.Application of sub-aperture stitching technique[J].Journal of Applied Optics,2008,29(6):1009-1012.
Authors:LIU Zhi-ying  ZHANG Lei  HU Yuan  GAO Tian-yuan  WANG Zhi-jian
Institution:School of Opto-electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
Abstract:The test and measurement of large-aperture optical elements can be made by subaperture stitching. The wavefront testing for each area of a large-aperture element under test was performed with a small aperture interferometer,and the wavefront of the large-aperture optical element was calculated according to the sub-aperture stitching results. It is more convenient for large-aperture optical elements to be tested with a small aperture interferometer by sub-aperture stitching method. The simulation of the sub-aperture stitching technology was carried out by the optical design software ZEMAX. The simulated result shows that the relative error of the wavefront testing is less than 4.3λ‰. The high-precision testing for the surface profile of a large-aperture optical element was realized with a small aperture interferometer.
Keywords:large aperture optical component  wavefront testing  sub-aperture stitching  small aperture interferometer
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