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刚体微位移非接触式光电检测系统
引用本文:周剑,骆德渊.刚体微位移非接触式光电检测系统[J].应用光学,1997,18(4):40-45.
作者姓名:周剑  骆德渊
作者单位:西安交通大学机械工程学院!西安,710049,西安交通大学机械工程学院!西安,710049,西安交通大学机械工程学院!西安,710049,西安交通大学机械工程学院!西安,710049
摘    要:提出用标定法测量刚体多维微位移,该方法具有结构简单,性能可靠,集成化程度高,工业上易实现和价格便宜等优点。本文采用一个小功率激光器为光源及一种新的CMOS图像传感器为光电传感器件,通过相关分析法和数据拟合等图像处理技术,提高整套系统的精度和分辨率。

关 键 词:标定法  微位移测量  图像传感器  光电检测  位移

NON-CONTACT ELECTRO-OPTICAL DETECTING SYSTEM FOR MEASURING RIGID BODY MICRO-DISPLACEMENT
Zhou Jian,Luo Deyuan,Jia Caichao,Tan Yushan.NON-CONTACT ELECTRO-OPTICAL DETECTING SYSTEM FOR MEASURING RIGID BODY MICRO-DISPLACEMENT[J].Journal of Applied Optics,1997,18(4):40-45.
Authors:Zhou Jian  Luo Deyuan  Jia Caichao  Tan Yushan
Abstract:It is proposed that rigid body multidimension micro-displacement is measured by use of a calibration method, and this method has the advantages of simple construction, reliable performance, high integrated level, easy realization in industry and inexpensive price etc..Taking a small power laser as light source and a new CMOS image sensor as electro-optical sensing device, and by use of some image processing technologies, such as correlation analysis and data fitting etc,, the accuracy and resolution of the whole system have been increased.
Keywords:calibration method  micro-displacement measuring  CMOS image sensor  correlation analysis
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