红外探测器光谱响应度测试技术研究

光谱响应度是探测器的重要技术参数之一，随着红外探测技术的发展，精确测量红外探测器的光谱响应度变得越来越重要。首先对红外探测器光谱响应度的测试技术进行分析，然后建立红外探测器相对光谱响应度测量装置，并用腔体热释电探测器在该装置上进行红外探测器光谱响应度校准实验。通过对红外探测器相对光谱响应度进行重复测量，给出测量结果的平均值，最后对影响测量结果的不确定度进行分析。由于该装置的测量范围是1～20μm，因此还可以实现InSb探测器和HgCdTe探测器相对光谱响应度的测量。不确定度分析结果表明，InGaAs探测器光谱响应度的测量精度较高。

Measurement technology for spectral responsivity of infrared detector

The spectral responsivity is one of the important parameters of detector. With the development of infrared detect technique,accurate measurement for the spectral responsivity of infrared detector becomes more and more important. The technique on how to measure the spectral responsivity of infrared detector is introduced. Based on an infrared spectral responsivity facility in the institute,the cavity pyroelectric detector is used to calibrate the relative spectral responsivity of infrared detector in several wavelengths on the facility. After repeated measurement,different results are achieved and their average is given in the paper. At last the uncertainty which influences the results is analyzed. Since the wavelength range of infrared spectral responsivity facility is 1 ～ 20 μm,the relative spectral responsivity of InSb detector and HgCdTe detector can also be measured. The analysis of the uncertainty shows that the measurement accuracy of the spectral responsivity of infrared detector meets the requirement.