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在金属基带上用激光脉冲沉积法制备帽子层CeO_2的研究
引用本文:冯校亮,杨坚,张华,刘慧舟,周其,古宏伟.在金属基带上用激光脉冲沉积法制备帽子层CeO_2的研究[J].低温与超导,2008,36(12).
作者姓名:冯校亮  杨坚  张华  刘慧舟  周其  古宏伟
摘    要:利用脉冲激光沉积法在带有Y2O3、YSZ隔离层的金属基带上制备了CeO2帽子层。主要讨论了温度、激光脉冲频率对CeO2隔离层的影响,用X射线θ~2θ扫描、Φ扫描对薄膜的取向和织构进行表征。结果表明在温度为610℃、激光频率为10Hz、1Pa氧压下制备的CeO2隔离层能有效地继承衬底的织构,平均平面内Φ扫描半高宽度为6.9°。扫描电镜可以观察到薄膜表面致密且无裂纹,原子力显微镜观测表面平均粗糙度在10nm以下。

关 键 词:脉冲激光沉积(PLD)  CeO2  YBCO

Growth of CeO2 cap layer for YBCO coated conductor on the metal substrate by PLD
Feng Xiaoliang,Yang Jian,Zhang Hua,Liu Huizhou,Zhou Qi,Gu Hongwei.Growth of CeO2 cap layer for YBCO coated conductor on the metal substrate by PLD[J].Cryogenics and Superconductivity,2008,36(12).
Authors:Feng Xiaoliang  Yang Jian  Zhang Hua  Liu Huizhou  Zhou Qi  Gu Hongwei
Abstract:The CeO2 Cap Layer was deposited on the cube textured metallic Ni-W substrates,on which Y2O3 and YSZ buffer layers had been deposited,by Pulsed Laser Deposition(PLD).X-ray θ~2θ scan,Φ-scan were used to observe the C-axis orientation and the in-plane alignment of the cap layer.It can be found that the CeO2 film has effectively inherited the texture of the substrate,the average in-plane Φ-scan Full Width High Maximum(FWHM) value is 6.9°.Even more,the result of Scanning Electron Microscopy(SEM) revealed a dense and crack-free CeO2 surface morphology,and the average range of the CeO2 surface was about 10nm observed by Atomic Force Microscopy(AFM).
Keywords:CeO2  YBCO
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