多源共蒸发制备高性能REBa2Cu3O7-x涂层导体的进展与展望

REBa2Cu3O7-x (RE：钇、钆等稀土元素，REBCO）高温超导体因其具备较高的不可逆场和上临界场等优越性能，一经发现就备受关注。但由于材料本身固有的陶瓷性及弱连接等属性，导致其实际应用起来难度较大。目前，人们已经发展了诸多制备工艺来克服这些困难，实现了REBCO超导体的实际应用。按照前驱膜沉积方法可将REBCO超导薄膜的制备分为物理法和化学法。本文综述了物理气相沉积（PVD-Physical Vapor Deposition）法中多源共蒸发法制备REBCO超导薄膜的技术起源及演变历程，并与金属有机沉积、金属有机化学气相沉积、脉冲激光沉积等不同方法生产的REBCO超导带材进行对比，突出多源共蒸发法制备的REBCO薄膜性能优异、在商业化生产效率上具有更大的优势。最后对多源共蒸发法制备REBCO超导薄膜进行总结及展望，解决多源共蒸发沉积制备REBCO薄膜的成相机理、提高薄膜的钉扎中心等问题对未来第二代高温超导带材的大规模应用具有重要意义。

The Progress and Prospect of High Performance REBa2Cu3O7-x Coating Conductors were Prepared By Multi-source Co-evaporation

REBa2Cu3O7-x (RE: rare earth elements, REBCO)high-temperature superconductors have attracted attention due to their superior performances such as high irreversible field and upper critical field.However, due to the inherent ceramic properties and weak connectionsof the material, the actual application is difficult. At present, many preparation processes have been developed to overcome these difficulties and realize the practical application of REBCO superconductors. The preparation of REBCO superconducting films can be divided into physical and chemical methods according to the precursor film deposition behavior. This article reviews the technical origin and evolution of REBCO superconducting thin films prepared by multi-source co-evaporation in physical vapor deposition and comparing with REBCO superconducting tape produced by different methods such as metal organic deposition, metal organic chemical vapor depositionand pulsed laser deposition, outstanding REBCO films prepared by the multi-source co-evaporation method are excellent in performance and have greater advantages in commercial production. Finally, we summarize and prospect the preparation of REBCO superconducting thin film by multi-source co-evaporation.It is of great significance for the large-scale application of the 2G HTS tapes in the future to solve the formation mechanism of REBCO film prepared by multi-source co-evaporation and improve the pinning centerof the film.