| 超导太赫兹天线耦合微测辐射热检测器 |
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| 引用本文： | 姜寿禄,武剑,马旭明,赵自然.超导太赫兹天线耦合微测辐射热检测器[J].低温物理学报,2020(6):279-284. |
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| 作者姓名： | 姜寿禄 武剑 马旭明 赵自然 |
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| 作者单位： | 清华大学工程物理系,粒子技术与辐射成像实验室,北京10084;同方威视技术股份有限公司,北京100084,同方威视技术股份有限公司,北京100084,同方威视技术股份有限公司,北京100084,清华大学工程物理系,粒子技术与辐射成像实验室,北京10084 |
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| 摘 要： | 超导太赫兹天线耦合微测辐射热检测器具备探测频段宽、响应速度快、灵敏度高、易于阵列化等特点因而具备广阔的应用前景.本文的主要工作是设计并微纳加工出基于氮化铌薄膜的超导器件,针对所制备器件的关键参数进行了表征.测试结果显示,当浴冷温度为4K 时,器件响应时间为4μs,噪声等效功率达到30fW/Hz0.5.基于所制备的器件进行了陶瓷刀被动扫描成像实验并取得了良好的成像效果
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| 关 键 词： | 超导 氮化铌 太赫兹 测辐射热 |
Superconducting Terahertz Antenna-coupled Microbolometer |
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| JIANG Shoulu,WU Jian,MA Xuming and ZHAO Ziran.Superconducting Terahertz Antenna-coupled Microbolometer[J].Chinese Journal of Low Temperature Physics,2020(6):279-284. |
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| Authors: | JIANG Shoulu WU Jian MA Xuming and ZHAO Ziran |
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| Institution: | Key Laboratory of Particle Radiation Imaging, Department of Engineering Physics, Tsinghua University, Beijing 100084;Nuctech Company Limited, Beijing 100084,Nuctech Company Limited, Beijing 100084,Nuctech Company Limited, Beijing 100084 and Key Laboratory of Particle Radiation Imaging, Department of Engineering Physics, Tsinghua University, Beijing 100084 |
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| Abstract: | Superconducting antenna-coupled micro-bolometer has the characteristics of wide detection bandwidth, fast response speed, high sensitivity, easy arraying and et al. So it has broad application prospects. The main work of this paper is to design and fabricate device based on niobium nitride film. The key parameters of the device are characterized. The experimental results show that when the bath temperature is 4 K, the device response time is 4us. The noise equivalent power reaches 30 fW/HZ0.5 at the optimum bias point (V bias = 3 mV, I bias = 55 A). Based on the fabricated device, a ceramic knife passive scanning imaging experiment was carried out and a good imaging effect was obtained. |
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| Keywords: | Superconductor Niobium-nitride Terahertz Bolometer |
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