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光学投影式三维轮廓测量技术综述
引用本文:郝煜栋,赵洋,李达成. 光学投影式三维轮廓测量技术综述[J]. 光学技术, 1998, 0(5)
作者姓名:郝煜栋  赵洋  李达成
作者单位:清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室
摘    要:主要用于散射物体的宏观轮廓测量的光学投影式轮廓测量技术可以分为两大类:直接三角法和相位测量法。直接三角法包括激光逐点扫描法、光切法和新近出现的二元编码图样投影法。相位测量法以测量投影到物体上的变形栅像的相位为基础,包括莫尔法、移相法、傅氏变换法等等。本文以基于相位测量和光栅投影法为重点综述了光学投影式轮廓测量技术的几种典型方法,讨论了它们的优缺点,并分析了研究热点和发展方向。

关 键 词:光学轮廓测量,光学投影,三角法,相位测量,莫尔技术,移相法,傅氏变换法,叠相还原

Review of optical profilometry based on light pattern projection
Hao Yudong Zhao Yang Li Dacheng. Review of optical profilometry based on light pattern projection[J]. Optical Technique, 1998, 0(5)
Authors:Hao Yudong Zhao Yang Li Dacheng
Abstract:Optical profilometry based on light pattern projection for macroscopic shape measurement of diffuse objects can be classified into two groups: direct triangulation and grating projection phase measurement method. The former includes laser spot scanning, light sectioning and newly developed binary encoded pattern projection profilometry. The latter, which is based on the phase measurement of deformed grating projected onto the object surface, includes moiré contouring, phase shifting method, Fourier transform technique, etc. Some typical techniques are reviewed, with emphasis on grating projection phase measurement method. Their advantages and disadvantages are discussed. Some current hot spots and future directions are analyzed.
Keywords:optical profilometry   light pattern projection   triangulation   phase measurement   moiré contouring   phase shifting   Fourier transform profilometry   phase unwrapping.
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