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差动共焦显微成像高稳定三维扫描技术与系统
引用本文:舒攀,盛忠,邱丽荣,赵伟瑞,赵维谦.差动共焦显微成像高稳定三维扫描技术与系统[J].光学技术,2017,43(3).
作者姓名:舒攀  盛忠  邱丽荣  赵伟瑞  赵维谦
作者单位:北京理工大学 光电学院 精密光电测试仪器及技术北京市重点实验室,北京,100081
基金项目:国家自然基金优秀青年基金,国家自然基金面上基金
摘    要:激光差动共焦显微镜具备高空间分辨率特点,但因其逐点扫描成像方式,扫描时间长,易受三维扫描系统不稳定和环境干扰等影响,产生系统漂移,影响仪器的空间分辨率。利用楔块机构高稳定特点,结合刹车机构的自由抱闸特性,设计了一种新型的轴向升降机构,由此构建了结构更具稳定特性的电动三维扫描系统。稳定性实验验证在搭建的激光差动共焦显微镜上进行,经过监测系统在90min内的轴向位置,轴向漂移小于50nm,与原三维扫描系统漂移140nm对比,漂移速度明显减慢,稳定性有显著提升,进而明显改善了差动共焦显微成像效果。

关 键 词:光学测量  差动共焦  三维扫描  楔块机构  高稳定

Highly stable three-dimensional scanning technology and system in differential confocal microscopy imaging
SHU Pan,SHENG Zhong,QIU Lirong,ZHAO Weirui,ZHAO Weiqian.Highly stable three-dimensional scanning technology and system in differential confocal microscopy imaging[J].Optical Technique,2017,43(3).
Authors:SHU Pan  SHENG Zhong  QIU Lirong  ZHAO Weirui  ZHAO Weiqian
Abstract:Laser differential confocal microscope owns the characteristics of high spatial resolution.But it must take more time scanning because of the characteristic of scanning imaging point by point, which easy to generate system drift by the effect of the three-dimensional scanning system and environment.A new axial lifting mechanism to construct a highly stable electric three-dimensional scanning system is designedby using the characteristics that wedge mechanism can be operation highly stable and brake mechanism can is broken free.A stability experiment is conductedon the laser differential confocal microscope built by the group.After a half hour the axial position's real-time changes of the scanning system is observed, the drift is less than 50nm by using the new three-dimensional scanning system, drift velocity is slower than using the old one which drifts 140nm.It own highly stable characteristic than the old, which significantly improves the differential confocal microscopy imaging.
Keywords:optical measurement  differential confocal  three-dimensional scanning  wedge mechanism  highly stable
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