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中性变密度盘的加工与检测
引用本文:石恒志,梁妍.中性变密度盘的加工与检测[J].光学技术,1994(5).
作者姓名:石恒志  梁妍
作者单位:中科院西安光机所
摘    要:本文就加工-精度要求高,且口径厚度比为35:1的薄形零件,设计了多种加工及上下盘方法,并用激光平面干涉仪测试加工过程,从而加工出高质量的零件.

关 键 词:粗磨,精磨,抛光,粘结,检验,光圈,消应力

Fabricating and testing of neutral density plate
Si Hengzhi Liang Yan.Fabricating and testing of neutral density plate[J].Optical Technique,1994(5).
Authors:Si Hengzhi Liang Yan
Institution:Si Hengzhi Liang Yan
Abstract:To make a high accuracy thin plate with the ratio between diameter and thickness,35:1,various fabricating and blocking methods are designed and the process of fabricating is checked by a laser flat interferometer.
Keywords:rough grinding  fine grinding  polishing  cementing  testing  fringe  stress relieving  
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