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显微镜工作台闭环控制系统的设计与实现
引用本文:吴耀春,萧泽新,高兴宇.显微镜工作台闭环控制系统的设计与实现[J].光学技术,2006,32(Z1).
作者姓名:吴耀春  萧泽新  高兴宇
摘    要:高精度工作台控制系统是现代自动显微系统的重要组成部分,其精度直接影响显微镜对样品的检测质量。介绍了一种基于AT89C52单片机的显微镜工作台闭环控制系统的设计方案。工作台移动时作为检测元件的光栅输出脉冲信号。单片机控制电路实现脉冲的计数并计算误差值,控制步进电机进行反馈补偿。步进电机通过细分驱动模块可以以四种不同的步距驱动工作台移动,以实现显微镜对工作台移动速度的不同需要。8位数码管实时显示工作台移动的实际位置。实验结果表明,该系统的重复定位精度可达到0.020mm,可满足显微镜对控制工作台的要求。

关 键 词:AT89C52  光栅检测  步距切换  补偿  重复定位精度

Design of microscopical worktable closed-loop control system
WU Yao-chun,XIAO Ze-xin,GAO Xing-yu.Design of microscopical worktable closed-loop control system[J].Optical Technique,2006,32(Z1).
Authors:WU Yao-chun  XIAO Ze-xin  GAO Xing-yu
Abstract:A high precision control system of worktable is the important part in modern advanced microscopic system,its re-orientation accuracy affects the sample observation quality of microscope directly.A design method about closed-loop control worktable for microscope based on AT89C52 singlechip is introduced.The grating as examined part outputs pulse signal when the worktable moves.The circuit controlled by singlechip realizes the count of pulses and calculates the error,controls the step-motor to carry on the feedback compensation.Step-motor can drives the worktable in 4 kinds of different step distance through the subdividing and driving module,realizes the worktable of microscope to move in different speed.8 digital LED displays the real position of worktable timely.The result of experiment indicates that re-orientation accuracy of this system achieves 0.020mm,which satisfies the request of the control worktable for microscope.
Keywords:AT89C52
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