子孔径拼接技术在长平晶计量中的应用研究

研究子孔径拼接在长平晶测试中的应用。讨论了子孔径拼接的基本原理,建立了子孔径拼接模型,确定了进行长平晶拼接测试的基本算法。根据最小二乘法的基本原理,编制了子孔径拼接数据处理程序,通过使用该程序,可以有效地修正测试过程中产生的倾斜量。进行了长平晶拼接检测实验,拼接结果与全孔径检测结果进行了比较,结果表明,该程序能够满足长平晶的检测要求。

The application research of sub-aperture stitching in long optical flat testing

The application of sub-aperture stitching in long optical flat was researched.The principle was discussed.Testing the model of sub-aperture stitching were established.According to the basic theory of least-squ,a program was designed for it.The tilting can be revised by using this program.Experiments were done to verify the feasibility and the validity of this program.After the anti-tilting the right stitching result can be gotten and it is possible to compare different test results with full-aperture.The result expressed that the program can satisfy the request of long optical flat testing.