软X射线多层膜反射式偏振光学元件设计 |
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引用本文: | 王洪昌,王占山,李佛生,陈玲燕,朱杰,崔明启.软X射线多层膜反射式偏振光学元件设计[J].光学技术,2003,29(3):277-280. |
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作者姓名: | 王洪昌 王占山 李佛生 陈玲燕 朱杰 崔明启 |
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作者单位: | 1. 同济大学物理系精密光学工程技术研究所,上海,200092 2. 中国科学院高能物理研究所,北京,100039 |
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基金项目: | 国家自然科学基金资助项目,批准号(60178021),上海市科技攻关项目(批准号:022261049) |
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摘 要: | 叙述了软X射线波段反射式多层膜起偏器和检偏器的设计原则和设计方法,计算了不同波段软X射线反射式多层膜起偏器和检偏器的性能,讨论了多层膜制作过程中,表界面误差(表面粗糙度和扩散)对起偏器和检偏器性能的影响,探讨了光谱分辨率对偏振元件测试过程的影响,这些设计、计算和分析为制作实用软X射线多层膜偏振光学元件提供了理论基础。
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关 键 词: | 软X射线 偏振 偏振率 准布儒斯特角 |
文章编号: | 1002-1582(2003)03-0277-04 |
修稿时间: | 2002年8月6日 |
Design of reflection multilayered polarizers and analyzers in the soft X-ray range |
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Abstract: | The conditions for optimum polarization of reflective multilayered polarizers and analyzers in the soft X ray range were given. The performances of reflection multilayered polarized components were calculated. The influence of the optical properties of the polarized components by the roughness and interdifussions in the interlayers of the multilayers and by the spectral and angular resolution in the process of the polarization measurements are discussed. The designs, calculations and analysis have laid a basis of the fabrication of multilayered polarized components in soft x ray range. |
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Keywords: | soft X-ray polarization polarized ratio quasi-Brewster's angle |
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