| 基于线阵CCD的全息光栅位移自动测量系统的研制与开发 |
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| 引用本文： | 赵育良,李开端,许兆林,张忠民.基于线阵CCD的全息光栅位移自动测量系统的研制与开发[J].光学技术,2002,28(3):204-206. |
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| 作者姓名： | 赵育良 李开端 许兆林 张忠民 |
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| 作者单位： | 海军航空工程学院青岛分院,青岛,266041 |
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| 摘 要： | 提出了一种新型的基于线阵CCD的全息光栅位移传感器 ,该系统利用线阵CCD分辨率高、像素均匀等特点 ,对干涉条纹的移动进行精确定位 ,全息光栅在测量过程中具有不受光源波长的影响、适用光谱范围宽等特点 ,实现了位移的自动精确测量。给出了系统误差分析及结果数据 ,经实验 ,系统稳定可靠 ,精度高。
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| 关 键 词： | 线阵CCD 全息光栅 位移传感器 |
| 文章编号： | 1002-1582(2002)03-0204-03 |
| 修稿时间： | 2001年7月31日 |
Manufacture and exploiture of holographic grating displacement auto-measuring system based on linear CCD |
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| ZHAO Yu-liang,LI kai-duan,XU Zhao-lin,ZHANG Zhong-min.Manufacture and exploiture of holographic grating displacement auto-measuring system based on linear CCD[J].Optical Technique,2002,28(3):204-206. |
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| Authors: | ZHAO Yu-liang LI kai-duan XU Zhao-lin ZHANG Zhong-min |
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| Abstract: | A kind of new holographic grating displacement sensor based on the linear CCD is made. This system carry out accurate location to interference stripe movement using high resolution capacity and resembles plain in color characteristic of CCD. Holographic grating do not receive influence of the wavelength of light source in measuring course, suitable spectrum scope wide. The auto-accurate measurement of displacement was realized. The system error analysis and result data is given. The system is steady and reliable by experiment. |
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| Keywords: | linear CCD holographic grating displacement sensor |
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