| 振幅型高温云纹光栅的制作工艺研究 |
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| 引用本文： | 谢惠民,王峰,戴福隆,王国韬.振幅型高温云纹光栅的制作工艺研究[J].光学技术,1995(5). |
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| 作者姓名： | 谢惠民 王峰 戴福隆 王国韬 |
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| 作者单位： | 德国克劳斯塔尔工业大学，烟台大学，清华大学 |
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| 摘 要： | 本文首次提出了双镀层振幅型高温云纹光栅的制作工艺，并应用此工艺在铍青铜、不锈钢材料上制作高温栅，并且分别进行了５５０℃长时间氧化实验和７５０℃的短时间氧化实验，实验结果表明，此工艺是可行的。
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| 关 键 词： | 高温云纹光栅，云纹法，光刻法 |
A Study on the Production of Amplitude Grating for High Temperature |
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| Xie Huimin Wang Feng Dai Fulong Wang Guotao.A Study on the Production of Amplitude Grating for High Temperature[J].Optical Technique,1995(5). |
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| Authors: | Xie Huimin Wang Feng Dai Fulong Wang Guotao |
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| Abstract: | In this paper,a new method for forming two-deposited layers amplitude grating for high temperature is put forward.Some high temperature tests up to 750℃ were conducted for measuring the oxidation resist abilities of this grating. The successful experimental results verifies this method is feasi-ble. |
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| Keywords: | amplitude Moire grating for high temperature Moire method photoetching method |
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