子孔径拼接干涉检测实验研究

为了满足国内ICF系统大口径光学元件的检测需要,提出了子孔径拼接干涉检测的方法。该方法是利用小口径干涉仪对大口径光学元件进行高精度波前检测。建立了拼接检测计算的模型。利用最小二乘法计算得到拼接参数,从而恢复大口径光学元件的全孔径波前相位分布。在理论分析的基础上设计了一套检测装置,对该装置的稳定性进行了实验研究。进行了两口径拼接检测的实验。拼接结果与全孔径检测结果进行了比较。结果表明,该检测方案能够满足大口径光学元件的检测要求。

Study on the experiments of the stitching interferometer

To meet the requirement of the specification of the large aperture components in ICF system, the sub-aperture stitching interferometer is introduced. The calculation model is established based on the theory of the least-square method, and a set of testing equipment is designed. To specify the stability of the tester a lot of experiments are done. Furthermore, two-sub-aperture stitching test is done to prove the correctness of the stitching theory. The results show that this kind of testing method is feasible and the performance of the tester is good enough to be used in the test work of the ICF system.