准分子激光电化学刻蚀镍的特性研究

提出一种新的准分子激光电化学加工工艺,在阳极钝化区内,通过准分子激光照射,以实现无屏蔽的各向异性的微加工。对该工艺进行了可行性分析,并对其进行了初步试验,证实在钝化区,准分子激光导致刻蚀电流增加的幅度比较明显,在此基础上,深入研究了在准分子脉冲激光作用过程中,刻蚀电流与脉冲数、脉冲频率之间的关系。表明准分子激光在钝化区具有增强电化学特性的能力。

Experimental study on characteristic of Ni in excimer-laser induced electrochemical etching

A novel etching mechanism which combines electrochemical micromachining with laser processing to enhance the anisotropy of the etching without mask is introduced. The feasibility of this strategy was analyzed and the role of excimer laser was demonstrated which obviously increase the etching current in electrochemical processing when in passivation region. Furthermore the dependence of etching current were proved on laser parameters(pulse number and pulse frequency) and that the excimer laser have the ability of enhancing the electrochemical processing is conformed.