| 衍射微透镜列阵的研究与应用 |
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| 引用本文： | 杜春雷,周礼书,邱传凯,白临波,王永茹,邓启凌.衍射微透镜列阵的研究与应用[J].光学技术,1998(3). |
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| 作者姓名： | 杜春雷 周礼书 邱传凯 白临波 王永茹 邓启凌 |
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| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室 |
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| 摘 要： | 本文研究了衍射微透镜列阵的设计与制作工艺方法，在此基础上研制出一系列衍射微透镜列阵，衍射效率均大于８５％，在深紫外、可见及红外波前传感器中得到了成功应用。
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| 关 键 词： | 衍射透镜，衍射效率，激光直写，RIE刻蚀 |
Study and application of diffractive microlens array |
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| Du Chunlei,Zhou Lishu,Qiu Chuankai,Bai Linbo,Wang Yongru,Deng Qiling.Study and application of diffractive microlens array[J].Optical Technique,1998(3). |
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| Authors: | Du Chunlei Zhou Lishu Qiu Chuankai Bai Linbo Wang Yongru Deng Qiling |
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| Abstract: | The design, fabrication and evaluation method for the diffractive microlens array have been studied, based on the research achievement, a series of diffractive microlens array have been manufactured with the diffractive efficiency larger than 85%, those elements have been successfully used in different wavefront sensors. |
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| Keywords: | diffractive lens diffractive efficiency laser direct write RIE etching |
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