| 干涉光杠杆测量原理及应用 |
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| 引用本文： | 刘兵,史广安.干涉光杠杆测量原理及应用[J].光学技术,1993(6). |
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| 作者姓名： | 刘兵 史广安 |
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| 作者单位： | 山东纺织工学院
(刘兵)，山东纺织工学院(史广安) |
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| 摘 要： | 本文分析了用激光干涉法,使用光杠杆的测微原理,这种测微原理具有精度高、测量快、实时显示的特点,对检测高乎整度器件有广泛的应用。
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| 关 键 词： | 干涉 光杠杆 测量 微小位移 |
Interference—optical—lever micrometric principle and applied |
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| Liu Bing.Interference—optical—lever micrometric principle and applied[J].Optical Technique,1993(6). |
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| Authors: | Liu Bing |
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| Abstract: | This paper analyse laser interferometrical micrometric principle by using optical-lever, the principle has high-grade precision, fast-grade measuring,;real-time display characteristic, and can be used in test of high-grade smooth object. |
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| Keywords: | interference optical-lever meusuring slight-displacement |
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