| 单目显微视觉测头动态测量技术的研究 |
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| 引用本文： | 屈玉福,浦昭邦,刘国栋,庄志涛.单目显微视觉测头动态测量技术的研究[J].光学技术,2004,30(6):753-755. |
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| 作者姓名： | 屈玉福 浦昭邦 刘国栋 庄志涛 |
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| 作者单位： | 哈尔滨工业大学,自动化测试与控制系,黑龙江,哈尔滨,150001 |
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| 摘 要： | 为了解决现有坐标测量机中的单目显微视觉测头视场小和景深小的缺点,提出了显微视觉测头的动态测量方法。建立了运动模糊图像的复原模型以及序列图像的全景组合模型,并提出了测量系统的自标定方法,标定重复性精度优于0.5nm。实验证明:该系统在以6mm/s的速度扫描测量时,测量重复性精度可达到5μm。
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| 关 键 词： | 单目显微视觉测头 动态测量 坐标测量机 |
| 文章编号： | 1002-1582(2004)06-0753-03 |
| 修稿时间： | 2004年2月25日 |
Study of dynamic measurement technology used monocular micro-vision probe |
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| QU Yu-fu,PU Zhao-bang,LIU Guo-dong,ZHUANG Zhi-tao.Study of dynamic measurement technology used monocular micro-vision probe[J].Optical Technique,2004,30(6):753-755. |
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| Authors: | QU Yu-fu PU Zhao-bang LIU Guo-dong ZHUANG Zhi-tao |
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| Abstract: | A dynamic measurement technology is designed in order to dispose of imperfection that is small field of view and small depth of field of monocular micro-vision probe. The models of motion restore of blur images and panoramic mosaics of sequence images are built, and the self-calibration method of system is brought up, whose uncertainty overmatches 1.1nm. The experiments demonstrated that the measurement uncertainty of the system is 5μm while the system moves with velocity of 6mm/s. |
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| Keywords: | monocular micro-vision probe dynamic measurement coordinate measuring machines |
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