| 硫代铝酸钡(BaAl_2S_4:Eu)靶材制备工艺研究 |
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| 引用本文： | 丁曌,张东璞,喻志农,薛唯.硫代铝酸钡(BaAl_2S_4:Eu)靶材制备工艺研究[J].光学技术,2009,35(5). |
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| 作者姓名： | 丁曌 张东璞 喻志农 薛唯 |
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| 作者单位： | 北京理工大学,光电学院,薄膜与显示技术实验室,北京,100081 |
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| 基金项目： | 北京市自然科学基金(3063022);;部委预研项目(51302060206) |
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| 摘 要： | 为制备薄膜无机电致发光显示器件中的硫代铝酸钡(BaAl2S4:Eu)蓝色发光层薄膜,采用粉末烧结的方法,经过对BaS,Al2S3,等原材料的粉碎、研磨、高温烧结,以及热压等过程,制备出用于溅射镀制BaAl2S4:Eu蓝色发光层薄膜的靶材样品。对制备的BaAl2S4:Eu发光层薄膜进行的光致发光分析表明,在300nm紫外光激发下,薄膜能够发射出峰值位于470nm处的蓝光。对发光层薄膜的XPS分析结果表明,发光层薄膜中含氧量较高,随着溅射功率的提高,薄膜中铝元素有显著增加;而随着淀积压强的增大,硫元素则显著减少。
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| 关 键 词： | 光学材料 溅射靶材 粉末烧结法 硫代铝酸钡掺杂铕(BaAl2S4:Eu) |
Research on the fabricating techniques of the BaAl2S4:Eu sputtering targets |
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| DING Zhao,ZHANG Dong-pu,YU Zhi-nong,XUE Wei.Research on the fabricating techniques of the BaAl2S4:Eu sputtering targets[J].Optical Technique,2009,35(5). |
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| Authors: | DING Zhao ZHANG Dong-pu YU Zhi-nong XUE Wei |
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| Institution: | School of Optoelectronics;Beijing Institute of Technology;Beijing 100081;China |
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| Abstract: | A new method on the fabricating techniques of the BaAl_2S_4:Eu sputtering target is introduced,which is called powder sintering method.The particular fabricating conditions based on the BaAl_2S_4:Eu sample are illustrated as comminution,rubbing,sintering and hot-pressing.The photoluminescence spectrum of the BaAl_2S_4:Eu films shows that there are 470nm PL emission peaks of the as-fabricated phosphor films excited by 300nm ultraviolet radiations.The BaAl_2S_4:Eu films contain more oxygen than other elements... |
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| Keywords: | optical material sputtering target powder sintering BaAl2S4:Eu |
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