薄膜非均匀性及其对增透膜性能的影响

基于非均匀膜理论提出的折射率分层模型,将非均匀膜层分为N个均匀子层,应用光学薄膜特征矩阵对其进行理论分析。应用膜系设计软件模拟ZrO2和CeO2的负非均匀性对增透膜光谱特性的影响。研究结果表明:负非均匀性使多层增透膜的反射率增大,在参考波长处的光谱特性变差,使整个反射光谱曲线朝长波方向漂移,从而导致整个膜系的光谱特性偏离理想情形。

Inhomogeneity of thin films and its influence on the spectral characteristics of antireflection coatings

Based on the theory of inhomogeneous thin films,a model for stratified refractive index is put forward.The inhomogeneous thin films can be divided into N homogeneous sublayers,subsequently,the theoretical analysis has been carried out utilizing the characteristic matrix of optical thin films.The influence of the negative inhomogeneity of ZrO2 and CeO2 thin films on the spectral characteristics of antireflection coatings has been simulated with coatings design software.The results indicate that the negative inhomogeneity will increase the reflectance of AR coatings,which makes the spectral characteristics become worse at reference wavelength and brings the whole spectral curve of reflectance to move towards the longer wavelength,as a result the spectral characteristics of antireflection coatings will deviate from ideal conditions greatly.