| 离子束辅助淀积低温微光学元件红外宽带增透膜 |
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| 引用本文： | 黄伟,张云洞.离子束辅助淀积低温微光学元件红外宽带增透膜[J].光学技术,1998(3). |
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| 作者姓名： | 黄伟 张云洞 |
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| 作者单位： | 中国科学院光电技术研究所 |
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| 摘 要： | 简要叙述了锗基片微光学元件红外宽带减反膜的设计与制作。着重介绍了离子束辅助淀积制备该膜系的过程，给出了用该方法制作８～１２μｍ波段的减反膜的测试曲线，它具有峰值透过率高，在设计波长范围内的平均透过率大于９７％以上，膜层附着好，可以切割和擦洗，可以在室温和１００Ｋ低温下反复循环使用。
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| 关 键 词： | 离子束辅助淀积，增透膜，镀膜技术 |
Ion beam assisted deposition of infrared wideband antireflection coating on micro optical components used in low temperature |
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| Huang Wei,Zhang Yundong.Ion beam assisted deposition of infrared wideband antireflection coating on micro optical components used in low temperature[J].Optical Technique,1998(3). |
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| Authors: | Huang Wei Zhang Yundong |
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| Abstract: | The design and fabrication of wide band infrared anti reflection film on Ge substrate micro optical components by ion beam assisted deposition are reported. The fabrication proceed of the film have been introduced in detail. The measured curve of 8～12μm wavelength range anti reflection film frabricated by this method has been given.The experimental result shows that the film has the properties such as high peak transmission, the average transmission in the designed wavelength range are greater than 97%, good adherency, and the ability to be used cyclically in ambient temperature and 100K low temperature. |
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| Keywords: | Ion beam assisted deposition antireflection coating deposition technique |
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