一种利用合成波长法实现的纳米测量方法

本文提出了一种利用合成波长法实现的纳米测量方案。在文中分析了多波长干涉术用于小尺寸测量的基本原理 ,提出了共光路的设计结构。其特点是能够将测量镜的纳米量级被测位移放大到参考镜的亚毫米量级位移 ,从而能够利用相对低精度的测量手段完成测量 ,共光路的设计使系统对外界的扰动有较好的抑制能力。文章还给出了简单的验证实验

Method of nanometer measurement using multi-wavelengths interferometry

In this paper, a measuring scheme with nanometer resolution in small scale using multi wavelengths interferometry is proposed. By measuring interference signal of synthetic wavelength, displacement of measuring mirror in micrometers can be magnified to that of reference mirror in sub millimeters, which can be handled easily by common methods. The design of common optical path structure improves the resistance to environment vibrations and temperature turbulence. The author also presents simple experiment to verify the thought.