实现光束变换的连续位相衍射光学器件的研制

本文利用基于模拟退火法和爬山法相结合的混合优化算法，实现光束变换的连续位相衍射光学器件的设计。通过灰阶掩膜板及离子刻蚀工艺，研制了 Φ１００ｍ ｍ 的连续位相衍射光学器件。通过多级衰减片及ＣＣＤ 实现了焦斑光强分布测量。测量结果表明：边缘陡峭、旁瓣小、中心主瓣具有一定均匀性，且没有中心零级锐脉冲的焦斑光强分布

Design and manufacture of continuous phase diffractive optical element to realize beam transform

In this paper, three processes of applying the continuous phase diffractive optical element to realize beam transform are involved. The phase design is completed by a kind of hybrid algorithm based on hillclimbing and simulated annealing, which exploits sufficiently strong convergence ability of the hill climbing and global optimization potential of the simulated annealing. The continuous phase diffractive optical element is fabricated by ion etching with hollowed out gray scale mask which is manufactured by linear cutting machine. Finally, the intensity distribution of the focal spot is measured by a general CCD and a series of attenuators which increase the measurement dynamic range. The experimental results after data processing show that the focal spot with sharg edge, low sidelobes and a certain uniformity is obtained and the center zeroth order pulse is suppressed.