新型自扫描激光干涉系统

本文介绍了一种新型自扫描激光干涉系统的原理和结构。该系统采用自扫描光电二极管列阵（以下简称ＳＳＰＤＡ）接收器件，实现对干涉仪信号的调制，使测量信号转换成交流信号，避免了直流放大器零点漂移，消除了低频干扰。实验证明，该系统在采用普通器件的情况下，其分辨率优于０．０２μｍ。

New self scanning laser interferometer

This paper describes the principle and structure of a new self scanning laser interferometer. This system utilizes a selfscanning photodiode array(SSPDA) as the photodetector, which achieves signal modulating of the interferometer and converts measuring signal into AC signals. This system avoids zero drift and eliminate disturbance of low frequency. The prototype of the system works well, its resolution is 002μm in 100 mm range at the speed of 1 mm/s which is limited by the device specification.