| 亚微米(i线和g线)投影光刻物镜的光学装校 |
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| 引用本文： | 姚汉民,魏全忠,齐晓慧.亚微米(i线和g线)投影光刻物镜的光学装校[J].光学技术,1998(3). |
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| 作者姓名： | 姚汉民 魏全忠 齐晓慧 |
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| 作者单位： | 中国科学院光电技术研究所 |
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| 摘 要： | 本文列出了ｉ线和ｇ线大数值孔径亚微米投影光刻物镜的技术指标要求，讨论了这类超高精度光刻物镜的光学装校技术特点，报告了计算机辅助高精度复杂光学系统偏心校正仪器和方法，最后给出了ｉ线和ｇ线光刻物镜装校检测结果。
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| 关 键 词： | 投影光刻物镜，光学装校，偏心测量 |
Optical assembly and rectification of sub micro (i line and g line) photolithographic lenses |
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| Yao Hanmin,Wei Quanzhong,Qi Xiaohui.Optical assembly and rectification of sub micro (i line and g line) photolithographic lenses[J].Optical Technique,1998(3). |
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| Authors: | Yao Hanmin Wei Quanzhong Qi Xiaohui |
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| Abstract: | The technical specifications about large digital apperture sub micro i line and g line photolithographic lenses are listed. The key points on the optical assembly and rectification of super precision photolithographic lenses have been discussed. The computer aid measuring instrument and method for centre errors in the high performance optical system are reported. The testing results of i line and g line photolithographic lenses. |
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| Keywords: | photolithographic lenses optical assembly and rectification centre error measuring |
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