| 位相型光瞳滤波器对共焦系统离焦工作状态横向分辨特性的影响 |
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| 引用本文： | 汪洪滨,邱丽荣,赵维谦.位相型光瞳滤波器对共焦系统离焦工作状态横向分辨特性的影响[J].光学技术,2009,35(3). |
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| 作者姓名： | 汪洪滨 邱丽荣 赵维谦 |
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| 作者单位： | 1. 哈尔滨汽轮机厂有限责任公司,哈尔滨,150001
2. 北京理工大学光电学院,北京,100081 |
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| 摘 要： | 分析了共焦显微系统(CMS)离焦状态工作时分辨特性的变化,指出了离焦状态是导致CMS横向分辨特性变差的主要影响因素之一。提出并采用了位相型超分辨光瞳滤波技术来改善CMS工作在离焦状态下的横向分辨特性,分析了超分辨光瞳滤波器位置变化对CMS横向分辨特性的影响。理论分析和实验验证表明,位相型超分辨光瞳滤波技术的引入,显著抑制了CMS工作在离焦状态时艾里斑旁瓣的增长,克服了CMS因工作在离焦状态而引起的横向分辨特性下降的缺点。
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| 关 键 词： | 光学测量 共焦系统 位相型光瞳 离焦特性 表面轮廓 超分辨滤波 |
Effect of phase-only pupil on lateral resolution property of the defocused confocal microscopy system |
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| WANG Hong-bin,OIU Li-rong,ZHAO Wei-qian.Effect of phase-only pupil on lateral resolution property of the defocused confocal microscopy system[J].Optical Technique,2009,35(3). |
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| Authors: | WANG Hong-bin OIU Li-rong ZHAO Wei-qian |
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| Institution: | 1.Harbin Steam Turbine Factory Limit Corp;Harbin 150001;China;2.Photoelectric College;Beijing Institute of Technology;Beijing 100081;China |
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| Abstract: | The variation of the resolution property of a defocused confocal microscopy system(CMS) is analyzed and the defocused state is considered as the main factor of influence on CMS lateral resolution property.In order to diminish this effect,superresolution pupil filtering technique using a phase-only pupil filter is proposed to improve the lateral resolution property of CMS under the defocused state,and the effect of pupil's position on CMS lateral resolution is analyzed.Experiments and analyses indicate that ... |
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| Keywords: | optical measurement confocal microscopy system phase-only pupil defocused property surface profile superresolution filtering |
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