| 超光滑加工的后置处理算法研究 |
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| 引用本文： | 刘健,王绍治,王君林.超光滑加工的后置处理算法研究[J].光学技术,2012,38(4):387-391. |
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| 作者姓名： | 刘健 王绍治 王君林 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室 |
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| 基金项目： | 国家科技重大专项项目(2009ZX02205) |
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| 摘 要： | 为了精确控制超光滑加工过程中磨头的运动轨迹,从而实现光学元件材料去除的均匀稳定,研究了超光滑加工的后置处理算法。分析了超光滑加工工艺的特点和相应的超光滑机床的机械结构,建立了机床的坐标系统,构造了机床的运动学模型。对于光学元件母线为任意平面曲线的情况,研究了磨头运动轨迹的等误差直线逼近算法。在曲率半径为290mm,相对口径为1∶2.9的凹球面上进行了超光滑加工实验。结果表明,利用所述算法可以精确地控制磨头的运动轨迹,从而保证材料去除的稳定性。
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| 关 键 词： | 光学制造 超光滑表面 后置处理 磨头轨迹 |
| 收稿时间： | 2012/2/20 |
Research of post processing algorithm for ultra-smooth optical surface polishing |
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| LIU Jian,WANG Shaozhi,WANG Junlin.Research of post processing algorithm for ultra-smooth optical surface polishing[J].Optical Technique,2012,38(4):387-391. |
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| Authors: | LIU Jian WANG Shaozhi WANG Junlin |
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| Institution: | (The State Key Laboratory of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Science,Changchun 130033,Jilin,China) |
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| Abstract: | In order to control polishing tool pathway of ultra-smooth optical surface polishing precisely,and realize optical element material removing uniformly,post processing algorithm of ultra-smooth optical surface polishing is researched.The technology characteristic of ultra-smooth polishing and the structure of ultra-smooth polishing machine are analyzed.The coordinate system of ultra-smooth polishing machine and the kinetics model are established.The equal-error straight lines approximating algorithm of polishing tool pathway is researched.The ultra-smooth polishing experiment is carried on a concave spherical surface,whose radius of curvature is 290mm and relative aperture is 1∶2.9.Practical experiment result shows that polishing tool pathway can be precisely controlled and material can be removed stably. |
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| Keywords: | optical fabrication ultra-smooth optical surface post processing polishing tool pathway |
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