| 基于SPR的类铬型金属膜厚在线纳米测量研究 |
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| 引用本文： | 李艳敏,李孟超,刘芳芳,金丹,张大伟,庄松林.基于SPR的类铬型金属膜厚在线纳米测量研究[J].光学技术,2012,38(1):9-13. |
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| 作者姓名： | 李艳敏 李孟超 刘芳芳 金丹 张大伟 庄松林 |
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| 作者单位： | 上海理工大学光电信息工程与计算机学院;上海市计量测试技术研究院 |
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| 基金项目： | 国家自然科学基金项目(60908021);国家质检总局科技计划项目(2011QK099) |
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| 摘 要： | 当具有足够大发散角的柱面光照射在匀厚金属薄膜表面时,由表面等离子体振荡产生的光反射率角分布是膜厚的函数,用CCD接收反射光分布信息并经过计算机分析处理,可实时、在线测量10nm内的铬、钛等金属膜厚,这类金属的复介电常数的实部相对虚部是较小的负数,故具有强反射锐峰及较平坦的吸收峰,该两峰点可作为膜厚测量依据的特征标记点,并通过建库进行曲线匹配而获得膜厚数值。实验结果表明,该方法的平均测量误差可低于0.4nm。
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| 关 键 词： | 应用光学 表面等离子体振荡 在线纳米测量 膜厚 |
| 收稿时间： | 2011/10/17 |
Study on online nanomeasurement of metal film thickness as Cr based on SPR |
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| LI Yanmin,LI Mengchao,LIU Fangfang,JIN Dan,ZHANG Dawei,ZHUANG Songlin.Study on online nanomeasurement of metal film thickness as Cr based on SPR[J].Optical Technique,2012,38(1):9-13. |
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| Authors: | LI Yanmin LI Mengchao LIU Fangfang JIN Dan ZHANG Dawei ZHUANG Songlin |
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| Institution: | 1(1.School of Optical-electronical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)(2.Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China) |
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| Abstract: | When the surface of metal film with uniform thickness is irradiated by cylindrical wave with sufficient large divergence angle,the reflectivity of the angular distribution caused by surface plasma resonance is the function of film thickness.The distribution information of reflected light is received by using CCD and analyzed by computer to realize real time,online measurement of metal film as Cr or Ti with thickness being within 10nm.For this kind of mental,the real part of complex dielectric relative to imaginary part is smaller negative number,so the metal has the strong reflection sharp peak and relative flat absorption peak.The two peak points can be used as feature mark points of film thickness measuring basis,and through building up database the thickness of film can be obtained by curve matching.The experiment shows that the average error of measurement can be less than 0.4 nm. |
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| Keywords: | applied optics surface plasma resonance(SPR) online nanomeasurement thickness of film |
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