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激光束偏转法非球面面形测量和计算
引用本文:朱秋东,郝群.激光束偏转法非球面面形测量和计算[J].光学技术,2002,28(1):22-23.
作者姓名:朱秋东  郝群
作者单位:北京理工大学,光电工程系,北京,100081
摘    要:提出了一种综合测量非球面面形的激光束偏转法 ,针对不同类型的非球面 ,共提出了三种方案 :平移法、转动法和平移转动法。该方法可测各种非球面 ,通用性强。并对激光束偏转法中对面形测量精度有极大影响的激光束反射角的测量作了重点介绍。实验结果显示 ,该方法测量精度达到λ/5~λ/10 ,接近干涉法的水平

关 键 词:激光束偏转法  非球面面形  线阵CCD
文章编号:1002-1582(2002)01-0022-02
修稿时间:2001年10月9日

Aspheric surface testing and calculating by laser deflectometry
ZHU Qiu dong,HAO Qun.Aspheric surface testing and calculating by laser deflectometry[J].Optical Technique,2002,28(1):22-23.
Authors:ZHU Qiu dong  HAO Qun
Abstract:A general laser deflectometry method was developed for testing aspheric surface According to various aspheric surfaces, three schemes were proposed: translating, rotating and rotating with translating schemes The method is versatile and can be used in the testing of various aspheric surfaces The measurement of laser reflecting angle that has significant effect on the precision of aspheric surface testing with laser deflectometry was studied in detail Experimental results exhibited that the accuracy of the method can attain λ/5~λ/10 that is close to interferometry
Keywords:laser deflectometry  aspheric surface  linear array CCD  
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