固体微/纳米尺度传热理论研究进展

随着半导体技术的飞速发展,器件的尺寸已进入到微/纳米尺度。由于量子效应、表面及界面效应,使得微尺度下的热物性与宏观尺度下有了明显的区别。人们针对微观传热领域的特点,发展了声子玻尔兹曼传输方程、分子动力学等方法,取得了一定的成果,但仍存在不少问题。一些基础概念问题,特别是非平衡态下的局域温度的定义,有待澄清。本文主要回顾近年来微/纳米尺度传热在理论和数值模拟方面的进展,以及目前所面临的挑战和问题。

PROGRESS IN MICROSCALE/NANOSCALE THERMAL TRANSPORT IN SOLID

Rapid progress in semiconductor technology makes microscale/nanoscale structures and devices more and more common. The thermal properties of materials at micrometer/nanometer scales are different from that of bulk because of quantum, surface and interface effects. People have developed several methods in this field like phonon Boltzmann transport equation(BTE), Molecular Dynamics(MD) and made many progresses. But some fundamental theoretical issues still need to be understood such as the definitions of local temperature in nonequilibrium nanoscale systems. This review emphasizes developments in theory and computation recent years and summarizes the present status and challenges in the field.