Self-consistent nonlinear resonance and hysteresis of a charged microparticle in a RF sheath |
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Authors: | Wang You-Nian Hou Lu-Jing Wang Xiaogang |
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Institution: | State Key Lab of Materials Modification by Beams, Department of Physics, Dalian University of Technology, China 116023. |
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Abstract: | A self-consistent model is proposed to study nonlinear phenomena, such as secondary resonance and hysteresis in the vertical oscillations of a charged microparticle in a radio-frequency sheath. The motion of a single microparticle in the sheath is simulated by solving Newton's equation in which various forces acting on the particle are taken into account. The particle charging and the sheath electric field are described by a self-consistent model of the collisional radio-frequency sheath dynamics. It is found that the nonlinearity is related to the particle's charge, the sheath electric field, and the external excitation force, as well as the ion drag force and neutral-gas friction on the particle. |
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