| 生长参数对碳纳米管阵列制备的影响 |
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| 引用本文： | 贺琪,林青,姚连增,蔡维理,朱旗.生长参数对碳纳米管阵列制备的影响[J].化学物理学报,2007,20(2):207-212. |
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| 作者姓名： | 贺琪 林青 姚连增 蔡维理 朱旗 |
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| 作者单位： | 中国科学技术大学理化科学实验中心，合肥230026；中国科学技术大学材料科学与工程系，合肥230026,中国科学技术大学理化科学实验中心，合肥230026；中国科学技术大学材料科学与工程系，合肥230026,中国科学技术大学理化科学实验中心，合肥230026；中国科学技术大学材料科学与工程系，合肥230026,中国科学技术大学理化科学实验中心，合肥230026；中国科学技术大学材料科学与工程系，合肥230026,中国科学技术大学理化科学实验中心，合肥230026；中国科学技术大学电子工程与信息科学系，合肥230027 |
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| 摘 要： | 利用化学气相沉积法在沉积铁纳米颗粒的硅衬底上制备了垂直方向高度有序的碳纳米管阵列．扫描电子显微镜的观测发现，碳纳米管阵列的形貌受到若干生长参数的影响，包括催化剂颗粒大小、反应温度和反应气体的分压等．研究发现，当反应温度升高，或反应气体中碳源气体含量增加时，碳纳米管变粗、变短．当催化剂薄膜的厚度减小时，碳纳米管的直径随之减小而纳米管阵列的高度则先增后减，有一个最大值．这些结果表明，碳纳米管的直径和阵列的高度可通过选择合适的反应温度、匀胶机转速和反应气比率来调节．
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| 关 键 词： | 碳纳米管阵列，化学气相沉积，生长参数 |
| 收稿时间： | 2006/4/30 0:00:00 |
E?ect of Growth Parameters on Morphology of Vertically Aligned Carbon Nanotubes |
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| Qi He,Qing Lin,Lian-zeng Yao,Wei-li Cai and Qi Zhu.E?ect of Growth Parameters on Morphology of Vertically Aligned Carbon Nanotubes[J].Chinese Journal of Chemical Physics,2007,20(2):207-212. |
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| Authors: | Qi He Qing Lin Lian-zeng Yao Wei-li Cai and Qi Zhu |
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| Institution: | Structure Research Laboratory, University of Science and Technology of China,Hefei 230026, China; Department of Materials Science and Engineering; University of Science and Technology of China,Hefei 230026, China,Structure Research Laboratory, University of Science and Technology of China,Hefei 230026, China; Department of Materials Science and Engineering; University of Science and Technology of China,Hefei 230026, China,Structure Research Laboratory, University of Science and Technology of China,Hefei 230026, China; Department of Materials Science and Engineering; University of Science and Technology of China,Hefei 230026, China,Structure Research Laboratory, University of Science and Technology of China,Hefei 230026, China; Department of Materials Science and Engineering; University of Science and Technology of China,Hefei 230026, China,Structure Research Laboratory, University of Science and Technology of China,Hefei 230026, China; Departmentof Electronic Engineering and Information Science, University of Science and Technology of China,Hefei 230026, China |
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| Abstract: | Vertically aligned carbon nanotubes (CNTs) were synthesized on Fe-deposited silicon substrates using chemical vapor deposition. Scanning electron microscope investigations reveal that the morphology of the CNTs depends on several growth parameters including the reaction temperature, the size of catalyst nanoparticles, and the partial pressure of the reaction gas. When the reaction temperature rises or the concentration of carbon source gas increases, the diameter of CNTs gets larger, but the length becomes shorter. With decreasing thickness of the catalyst film, the diameter of the CNTs shrinks monotonically, but the length of the CNTs increases first, reaches a maximum and then decreases afterwards. These results indicate that the diameter and the length of the vertically aligned CNTs can be manipulated by selecting appropriate growth parameters. |
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| Keywords: | Aligned carbon nanotubes Chemical vapor deposition Growth parameters |
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