单晶硅表面有机硅烷/Ag2O纳米微粒复合自组装膜的制备和表征

利用分子自组装成膜技术 ,在单晶硅表面制备了有机硅烷 /Ag2 O纳米微粒复合膜 .应用接触角测定仪、原子力显微镜和X射线光电子能谱仪分析表征了薄膜的组成和结构 .结果表明 ,通过硅烷偶联剂 3 氨丙基 三乙氧基硅烷在单晶硅基底表面的成功组装 ,获得了较为均匀的硅烷化表面 ,而Ag2 O纳米微粒可在硅烷化表面成功地进行组装 ,并呈亚单层排布

Preparation and Characterization of Ag2 O/Organicsilicone Self-assemblied Composite Film

The composite film of nanometer AgO 2/silane cou pl ing reagent aminopropyltriethoxy silane (CH 3O) 3Si(CH 2) 3NH 2 was pr epared on single crystal silicon by the self assembly of silane on the hydroxy lated substrate followed with the deposition of nanometer AgO 2 on the silane S AMs from an aqueous Ag 2O gel. The resultant composite film was characterized b y means of X ray photoelectron spectroscopy (XPS) and atomic force microscopy ( AFM). The contact angles of distilled water on the silane SAMs and the composite film were measured to compare the surface states. The experiment shows that the nanometer Ag 2O can be easily incorporated in the silane SAMs and lead to chan ged surface state of the composite film. Nanometer Ag 2O crystallites in a size of about 20 nm distribute quite uniformly in the composite film. It was anticip ated that the composite film might find application to the protection of single crystal Si substrate in MEMS devices and also propose a novel single electron device structure based on nanoscale Ag 2O colloidal particles. WT5HZ