| 等离子辅助后处理对锰掺杂氮化钛薄膜磁特性的影响 |
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| 引用本文： | 李丹,许灵敏,李树玮,周勋.等离子辅助后处理对锰掺杂氮化钛薄膜磁特性的影响[J].化学物理学报,2017,30(4):457-460. |
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| 作者姓名： | 李丹 许灵敏 李树玮 周勋 |
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| 基金项目： | This work is supported by the Science and Technology Cooperation Plan of Guizhou Province (JLKS[2013]15),the 2012 Doctor Foundation of Guizhou Normal University of China (Xun Zhou) Scholars of Ministry of Education of China,Ph.D.Programs Foundation of Ministry of Education of China (No.20120171120011),the Open Fund of the State Key Laboratory on Integrated Optoelectronics of Jilin University (No.IOKL2013KF14),the National Natural Science Foundation of China (No.61273310). |
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| 摘 要： |
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| 收稿时间： | 2017/3/20 0:00:00 |
| 修稿时间： | 2017/6/26 0:00:00 |
Plasma Treatment Enhanced Magnetic Properties in Manganese Doped Titanium Nitride Thin Films |
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| Dan Li,Ling-ming Xu,Shu-wei Li and Xun Zhou.Plasma Treatment Enhanced Magnetic Properties in Manganese Doped Titanium Nitride Thin Films[J].Chinese Journal of Chemical Physics,2017,30(4):457-460. |
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| Authors: | Dan Li Ling-ming Xu Shu-wei Li and Xun Zhou |
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| Abstract: | The ferromagnetic manganese doped TiN films were grown by plasma assisted molecular beam epitaxy on MgO(001) substrates. The nitrogen concentration and the ratio of manganese at Ti lattice sites increase after the plasma annealing post treatment. TiN(002) peak shifts toward low angle direction and TiN(111) peak disappears after the post treatment. The lattice expansion and peak shift are mainly ascribed to the reduction of nitrogen vacancies in films. The magnetism was suppressed in as-prepared sample due to the pinning effect of the nitrogen vacancies at defect sites or interface. The magnetism can be activated by the plasma implantation along with nitrogen vacancies reduce. The decrease of nitrogen vacancies leads to the enhancement of ferromagnetism. |
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| Keywords: | Epitaxial growth Magnetic materials Thin films Solar energy materials |
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