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纳米Ge颗粒镶嵌薄膜的Raman散射光谱研究
引用本文:岳兰平,何怡贞.纳米Ge颗粒镶嵌薄膜的Raman散射光谱研究[J].物理学报,1996,45(10):1756-1761.
作者姓名:岳兰平  何怡贞
作者单位:(1)中国科学院固体物理研究所; (2)中国科学院固体物理研究所;中国科学技术大学结构分析开放研究实验室
摘    要:研究了镶嵌在SiO介质中的不同尺寸(4—16nm)纳米Ge颗粒的Raman散射谱特征,与大块标准Ge晶体的散射峰相比,观察到了理论预期的纳米半导体粒子的Raman散射峰的宽化和红移现象.采用声子限域模型较好地解释了实验结果.探讨了SiO介质基体作用于镶嵌Ge粒子的压应力以及纳米Ge粒子的表面界面效应对Raman散射光谱的峰形、峰位变化所产生的影响 关键词

关 键 词:半导体  锗粒镶嵌  薄膜  散射谱
收稿时间:1995-08-31

A STUDY OF THE RAMAN SCATTERING OF Ge NANOCRYSTALLITES EMBEDDED IN SiO THIN FILMS
YUE LAN-PING and HE YI-ZHEN.A STUDY OF THE RAMAN SCATTERING OF Ge NANOCRYSTALLITES EMBEDDED IN SiO THIN FILMS[J].Acta Physica Sinica,1996,45(10):1756-1761.
Authors:YUE LAN-PING and HE YI-ZHEN
Abstract:Raman scattering of Ge nanocrystallites from 4 to 16nm is size, embedded in SiO thin films has been studied. The Ge-SiO samples were prepared by ion-beam sputtering and a post-annealing technique. A red shift and broadening of the Raman peak observed with decreasing the size of Ge particles are in good agreement with the calculated results based on the phonon confinement theory. Effects of the surface and interface of the Ge-nanocrystallites on Raman spectra have also been investigated.
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