| 离子轰击入射角对溅射参数的影响 |
| |
| 引用本文： | 邵其鋆,霍裕昆,陈建新,吴士明,潘正瑛.离子轰击入射角对溅射参数的影响[J].物理学报,1991,40(4):659-666. |
| |
| 作者姓名： | 邵其鋆 霍裕昆 陈建新 吴士明 潘正瑛 |
| |
| 作者单位： | 复旦大学物理二系,上海,200433 |
| |
| 摘 要： | 本文用基于两体碰撞近似的蒙特-卡罗模拟方法研究离子轰击入射角对溅射参数的影响,讨论了入射角与溅射产额、溅射粒子能谱、角分布和阈能的关系,并把计算结果与某些半经验公式和实验数据进行了比较。
关键词：
|
| 关 键 词： | 离子轰击 入射角 溅射参数 |
| 收稿时间： | 1990-06-12 |
INFLUENCE OF THE INCIDENCE ANGLE OF THE ION-BOMBARDMENT ON THE SPUTTERING PARAMETERS |
| |
| SHAO QI-YUN,HUO YU-KUN,CHEN JIAN-XIN,WU SHI-MING and PAN ZHENG-YING.INFLUENCE OF THE INCIDENCE ANGLE OF THE ION-BOMBARDMENT ON THE SPUTTERING PARAMETERS[J].Acta Physica Sinica,1991,40(4):659-666. |
| |
| Authors: | SHAO QI-YUN HUO YU-KUN CHEN JIAN-XIN WU SHI-MING and PAN ZHENG-YING |
| |
| Abstract: | In this paper, the effects of the incidence angle of the ion-bombardment on the puttering parameters ire investigated by using Monte Carlo simulation based on the binary collision approximation. The dependence of sputtering yields, energy and angular distribution as well as threshold energy of sputtered particles on incidence angle are discussed. The results of calculation are compared with data given by semi-empirical formula and measurments. |
| |
| Keywords: | |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《物理学报》浏览原始摘要信息 |
| 点击此处可从《物理学报》下载免费的PDF全文 |
|
