首页 | 本学科首页   官方微博 | 高级检索  
     检索      

低温氩等离子体中的单探针和发射光谱诊断技术
引用本文:牛田野,曹金祥,刘磊,刘金英,王艳,王亮,吕铀,王舸,朱颖.低温氩等离子体中的单探针和发射光谱诊断技术[J].物理学报,2007,56(4):2330-2336.
作者姓名:牛田野  曹金祥  刘磊  刘金英  王艳  王亮  吕铀  王舸  朱颖
作者单位:中国科学技术大学近代物理系,中国科学院基础等离子体物理重点实验室,合肥 230026
摘    要:使用静电探针和发射光谱分析方法,测量了实验室圆柱形辉光等离子体轴向I-V曲线和发射光谱.通过电子能量概率函数方法、Fermi-Dirac模型、低气压放电的Schottky扩散理论,分别计算了等离子体的电子温度、电子激发温度和电子密度.研究了利用等离子体发射光谱计算电子激发温度、低气压放电理论估算电子密度的方法与静电探针诊断方法的内在联系,讨论了不同方法的使用特点.所研究的方法在某些特殊环境的等离子体参数诊断中具有较好的参考和应用价值. 关键词: 静电探针 发射光谱 电子能量概率函数 Fermi-Dirac模型

关 键 词:静电探针  发射光谱  电子能量概率函数  Fermi-Dirac模型
文章编号:1000-3290/2007/56(04)/2330-07
收稿时间:8/1/2006 12:00:00 AM
修稿时间:08 1 2006 12:00AM

The techniques of single probe and emission spectroscopy diagnostics in low temperature argon plasmas
Niu Tian-Ye,Cao Jin-Xiang,Liu Lei,Liu Jin-Ying,Wang Yan,Wang Liang,Lü You,Wang Ge,Zhu Ying.The techniques of single probe and emission spectroscopy diagnostics in low temperature argon plasmas[J].Acta Physica Sinica,2007,56(4):2330-2336.
Authors:Niu Tian-Ye  Cao Jin-Xiang  Liu Lei  Liu Jin-Ying  Wang Yan  Wang Liang  Lü You  Wang Ge  Zhu Ying
Institution:Chinese Academy of Science Key Laboratory of Basic Plasma Physics, Department of Modem Physics University of Science and Technology of China, Hefei 230026, China
Abstract:Electric probe and analytical emission spectroscopy were used to acquire I-V curve and spectra of cylindrical plasmas produced by dc high-voltage discharge in the laboratory. The electron excitation temperature, electron temperature and electron density were obtained using respectively the electron energy probability function, Fermi-Dirac model and Schottky diffusion theory of low pressure discharge. The inherent relationships between the method of emission spectroscopy for determination of electron excitation temperatures, method of low-pressure discharge theory for estimation of electron density, and method of electric probe for calculation of electron temperature and density were explored. Further more, the spcial features of different diagnostic techniques were discussed. It was pointed out that the methods described in the article have preferential applications in plasma diagnostics under special environments.
Keywords:electric probe  emission spectroscopy  electron energy probability function    Fermi-Dirac model
本文献已被 CNKI 维普 万方数据 等数据库收录!
点击此处可从《物理学报》浏览原始摘要信息
点击此处可从《物理学报》下载免费的PDF全文
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号