脉冲激光对类金刚石（DLC）薄膜的热冲击效应研究

强激光辐照红外热像系统时，可造成系统的干扰和破坏，激光的波长不同，对系统的破坏效果也不同.为了保护红外系统窗口以及提高窗口的透过率，红外窗口广泛沉淀类金刚石（DLC）薄膜.当入射的激光波长位于红外系统响应波段外时，激光对系统的破坏首先是激光对DLC薄膜的破坏.以波长为1.06μm的激光为例，研究了脉冲激光对DLC薄膜的损伤机理，建立了DLC薄膜的热冲击效应模型，并通过求解热传导和应力平衡方程，得出了薄膜的温度场和应力场分布.理论分析表明，热应力破坏在脉冲强激光对DLC膜的损伤机理中占主导地位.当 辐照能量密度为E₀=100mJ·cm^-2时，在薄膜表面距光斑中心约 40μm区域内的压应 力明显超出其断裂强度，将造成膜层的剥离、脱落.理论分析与实验结果基本相符，表明建 立热冲击效应模型的正确性. 关键词： 激光辐照 类金刚石（DLC）薄膜 热冲击效应

Thermal shock effect on diamond-like carbon thin films induced by pulsed-laser

When high power laser irradiates the infrared imaging system, the system will be injured or destroyed. The damage to the systems varies for different laser wavelengths. The infrared windows are generally coated with diamond-like carbon(DLC) thin films to protect itself and improve the permeation rate. When the incid ent laser's wavelength lies outside the infrared system response wave band, lase r destroys the DLC films firstly. The DLC films' damage mechanism induced by pul sed laser is studied with the 1.06μm laser. The thermal shock effect model of D LC films is proposed. The temperature and stress distributions are deduced throu gh solving the thermal conduction equation and stress-balance equation. The theo retical analysis shows that thermal stress fracture dominants in the damage mech anism. When the irradiation energy density is E₀=100mJ·cm^-2 , the pressu re on the surface of DLC films at about 40μm from the center of laser facula ex ceeds the rupture intensity, the film will break and peel off. The theoretical a nalysis matches the experimental results basically, and the correctness of the t hermal shock effect model is confirmed.